1. EUV LITHOGRAPHY PROOF IS IN THE PRINTING
by Art Robinson
(Contact: PNaulleau@lbl.gov)

An old adage says, "If you can't measure it, you can't make it." So it's no accident that metrology beamlines built and operated at the ALS under the auspices of Berkeley Lab's Center for X-Ray Optics (CXRO) have been instrumental in a 5-year, $250-million industry–national laboratory effort to bring extreme ultraviolet (EUV) lithography to the commercial stage. EUV lithography is the future chip-printing technology that the Semiconductor Industry Association began backing in 2001 as the likely successor, around the year 2007, to the reigning family of refractive optical lithography techniques. The EUV promise is that with wavelengths 50 times smaller than those of visible light, it will be able to draw circuit patterns just tens of nanometers wide. In comparison, the current industry state-of-the-art chips have patterns with 130-nm lines.

Read the full story at http://www-als.lbl.gov/als/science/sci_archive/53euv.html.

Publication about this research: P.P. Naulleau et al., "Static Microfield Printing at the Advanced Light Source with the ETS Set-2 Optic," Proc. SPIE 4688-05 (2002, in press).

2. ALS DOCTORAL FELLOWSHIP WINNERS ANNOUNCED
(Contact: ZHussain@lbl.gov)

The ALS is extremely pleased to announce this year's winners of ALS Doctoral Fellowships: Alejandro Aguilar (Univ. of Nevada, Reno, ion spectroscopy), Andreas Augustsson (Uppsala University, molecular and material physics), Henry Chong (Univ. of California, Berkeley, femtosecond x-ray spectroscopy with a slicing source), David Edwards (Princeton University, environmental geochemistry), Daniel Rolles (Technical University Berlin, atomic and molecular physics), and Zhe Sun (University of Colorado, condensed matter physics). These exceptional Ph.D. students have been selected to perform a major part of their thesis work at the ALS during a one-year appointment covering the 2002 - 2003 academic year. For Alejandro and Henry, this will be a continuation of their fellowship grants from last year. Congratulations to all six! The selection committee consisted of Roger Falcone (Univ. of California, Berkeley, and ALS Users' Executive Committee Chair), Zahid Hussain (ALS), Steve Kevan (Univ. of Oregon and ALS Science Advisory Committee Chair), Zhi-Xun Shen (Stanford Univ.), and Neville Smith (ALS). Detailed information about the fellowships, along with links to frequently asked questions and the application form, can be found at http://www-als.lbl.gov/als/fellowships/index.html.

3. ADJUSTMENTS MADE TO RAPID-ACCESS PROPOSAL PROCEDURE
(Contact: pxproposals@lbl.gov)

The ALS's rapid-access system for independent investigators in protein crystallography is being fine-tuned to better accommodate the actual rate of proposal submission observed over the past few months. Essentially, the system will expand from a monthly cycle to a two-month cycle. Proposals would be due on the 15th of the first month of each cycle for beamtime to be awarded in the next cycle (i.e., a month and a half later). For example, the last proposal deadline was June 15 for beamtime to be awarded in the August - September run cycle. The next deadline will be August 15 for beamtime to be awarded in the October - November run cycle. (There will be no proposal deadlines in July or September.) Proposal forms as well as up-to-date information about beamtime cycles and submission deadlines are posted at http://www-als.lbl.gov/als/quickguide/independinvest.html. Also, schedules for the protein crystallography beamlines can be found at http://www.lbl.gov/LBL-Programs/mcf/Schedules/ScheduleMain.htm. As always, feedback from the protein crystallography community would be very welcome at this stage. Please send any questions or comments to pxproposals@lbl.gov.

4. CORRECTION TO USERS' MEETING DATES

This year's ALS Users' Meeting will be held at Berkeley Lab Thursday through Saturday, October 10 - 12, 2002, not October 10 - 11, as was mentioned in the last issue of ALSNews. More information will be posted online as soon as it becomes available.

5. WHO'S IN TOWN: A SAMPLING OF ALS USERS

Following are some of the experimenters who will be collecting data during the next two weeks at the ALS.

Beamline 1.4.3
Simon Clark (Berkeley Lab)

Beamline 4.0.2
Chuck Fadley (Univ. of California, Davis, and Berkeley Lab)
Dan Waddill (Univ. of Missouri-Rolla)

Beamlines 5.0.1, 5.0.2, 5.0.3
Ed Berry, David Cobessi, LiShar Huang, Yusef Collins, Cesar Chavez (Berkeley Lab)
Janos Lanyi, Brigitte Schobert-Lanyi (Univ. of California, Irvine)
Joel Bard, Kevin Parris (Genetics Institute)
Dong Hae Shin, Shengfeng Chen, Jinyu Liu (Berkeley Structural Genomics Center)
Steve Holbrook, Ursula Schulze-Gahmen (Berkeley Lab)
Gyorgy Snell, Dave Hosfield (Syrrx, Inc.)

Beamline 7.0.1
Harald Ade (North Carolina State Univ.)
Brian Tonner (Univ. of Central Florida)
Jim Tobin (Lawrence Livermore National Laboratory)

Beamline 7.3.1.1
Z.Q. Qiu (Univ. of California, Berkeley)
Simone Anders (IBM Almaden Research Center)

Beamline 7.3.3
Teresa Head-Gordon (Berkeley Lab)

Beamline 8.0.1
Richard Saykally (Univ. of California, Berkeley)
David Sherman (Univ. of Bristol, UK)

Beamline 9.3.2
Javier Diaz (Univ. de Oviedo, Spain)

Beamline 10.0.1
Ron Phaneuf (Univ. of Nevada, Reno)
Z.X. Shen (Stanford Univ.)

Beamline 10.3.2
Alain Manceau (Berkeley Lab)

6. OPERATIONS UPDATE
(Contact: Lampo@lbl.gov)

For the user run of June 19 - 24, the beam reliability (time delivered/time scheduled) was 95%. Of the scheduled beam, 79% was delivered to completion without interruption. There were no significant outages.

Long-term and weekly operations schedules are available on the Web (http://www-als.lbl.gov/als/accelinfo.html). Requests for special operations use of the "scrubbing" shift should be sent to Bruce Samuelson (BCSamuelson@lbl.gov, x4738) by 1:00 p.m. Friday. The Accelerator Status Hotline at (510) 486-6766 (ext. 6766 from Lab phones) features a recorded message giving up-to-date information on the operational status of the accelerator.

LBNL/PUB-863
Editors: lstamura@lbl.gov, alrobinson@lbl.gov, amgreiner@lbl.gov

This work was supported by the Director, Office of Science, Office of Basic Energy Sciences, of the U.S. Department of Energy under Contract No. DE-AC03-76SF00098.