Programme

P.3 -- Poster, VCTP-45

Date: Tuesday, 13 October 2020

Time: 08:30 - 10:00

Exact mode shapes of T-shaped and overhang-shaped microcantilevers

Le Tri Dat (1,2), Vu Lan (3) and Nguyen Duy Vy (1,2)

(1) Laboratory of Applied Physics, Advanced Institute of Materials Science, Ton Duc Thang University, Ho Chi Minh City 756636, Vietnam; (2) Faculty of Applied Sciences, Ton Duc Thang University, Ho Chi Minh City 756636, Vietnam; (3) Quang Trung High School, Dong Xoai, Binh Phuoc 831304, Vietnam.

Micro-mechanical systems have been widely used in vibration transducing, energy harvesting, and highly sensitive measurement. Observing a change of resonance frequencies or mode shapes of a microcantilever can reveal the physical or chemical properties of an object when it is adsorbed on the cantilever surface. The commonly used structure of the cantilever is a rectangular-shaped beam; however; the T-shaped and overhang-shaped structures have recently attracted many researchers due to their wide application. Nevertheless, obtaining the frequency of the cantilever is challenging from the analytical viewpoint. In this work, we figured out the exact modes for T-shaped and overhang-shaped cantilevers. The obtained mode shapes show significant deviations comparing to the approximate forms of a rectangular cantilever. Moreover, based on these exact solutions, the frequencies of microcantilevers with these complicated dimensions were revealed.

Presenter: Le Tri Dat

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