Mirror Stage |
custom flexure stage
roll and yaw runout
travel distance
position resolution |
high yield strength maraging steel
< 1 µrad
17 mm
3 Å @ 200 kHz |
Mirrors |
4 mirrors permanently mounted on an alignment prism
interferometrically flat for soft x-rays
alignment |
zerodur for thermal stability
slope error <0.5 µrad
finish < 2 Å rms
<0.6 µrad |
Beam Splitter |
preferentially etched, single-crystal silicon mirrors
wavefront dividing
optical coating |
50 µm slots; 100 µm period
low-stress Mo film |
Beam Splitter Mounts |
computer controlled picomotors and high-precision LVDT encoders
alignment stability (preliminary) |
fine alignment control <0.2 µrad
<< 1 mrad/week |